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MATERIALS SCIENCE AND TECHNOLOGY. DIELECTRICS
ArticleName Study of spectral dependence of the absorption coefficient in undoped silicon−carbon films
ArticleAuthor M. D. Malinkovich, Yu. N. Parkhomenko, M. L. Shupegin, A. P. Bliev, A. V. Gritsenko
ArticleAuthorData M. D. Malinkovich; Yu. N. Parkhomenko; M. L. Shupegin; A. P. Bliev, MISiS National Research and Technical University; A. V. Gritsenko, North Ossetia State University.
Abstract

The spectral dependence of the absorption coefficient has been studied in the 190 nm to 1.9 μm region for undoped silicon−carbon films synthesized from polyphenylmethylsiloxane (PPMS) silicon organic liquid by high−frequency deposition from PPMS vapor plasma. We show that the short−wave absorption region of the films is not monotonic and contains various types of electron transitions, probably including interband ones.

keywords Absorption coefficient, silicon−carbon films, polyphenylmethylsiloxane.
References

1. Malinkovich, M. D. Tekhnologiya polucheniya, struktura i svoystva metallsoderzhashchikh nanokompozitov s kremniy−uglerodnoy matritsey / M. D. Malinkovich, Yu. N. Parkhomenko, E. A. Skryleva, M. L. Shupegin // Izv. vuzov. Materialy elektron. tekhniki. − 2005. − № 3. − S. 12—16.
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3. Belogorokhov, A. I. Issledovanie molekulyarnoy struktury matritsy almazopodobnykh kremniy−uglerodnykh nanokompozitov / A. I. Belogorokhov, A. M. Dodonov, M. D. Malinkovich, Yu. N. Parkhomenko, A. P. Smirnov, M. L. Shupegin // Izv. vuzov. Materialy elektron. tekhniki. − 2007. − № 1. − S. 69—71.
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