A thermodynamic model of the homogeneous and heterogeneous formation of catalyst clusters has been developed. The formation parameters of cluster generated as a result of ferrocene pyrolysis have been studied experimentally and theoretically. I show that the superficial tension and the sizes кластеров essentially depend on temperature. The surface tension coefficients and the characteristic cluster sizes have been calculated. The resultant dependences and parameters allow one to restore the cluster size distribution function by setting the temperatures in the working zone and in the ferrocene sublimation zone. This gives the possibility to predict cluster sizes depending on synthesis parameters, e.g. temperature.

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