EPITAXIAL LAYERS AND MULTILAYERED COMPOSITIONS | |
ArticleName | Influence of Ge Ion Implantation into Silicon Dioxide/Silicon Structure on Charge Accumulation under Low–Energy Stationary Radiation |
ArticleAuthor | O. P. Guskova, V. M. Vorotynthev, E. L. Shobolov, N. D. Abrosimova |
ArticleAuthorData | Federal State –owned Unitary Enterprize «Federal Science and Production Center Measuring Systems Research Institute named after Yu. Ye. Sedakov»: O. P. Guskova E. L. Shobolov N. D. Abrosimova
Nizhny Novgorod, State technical University named after R. E. Alekseev: V. M. Vorotynthev |
Abstract | Results on the influence of Ge ion implantation into pyrogenic SiO2 on radiation charge accumulation are presented. Ge embedding in the silicon dioxide/ silicon system has been analyzed theoretically. We show that Ge ion embedding in the stoichiometric silicon dioxide at the silicon dioxide / silicon interface or forming Ge nanoclusters in the SiO2 bulk provide an energetic advantage. |
keywords | Radiation hardness, dielectric layer, foreign atom implantation |
References | 1. Nikiforov, A. Yu. Radiatsionnye effekty v KMOP IS / A. Yu. Nikiforov, V. A. Telets, A. I. Chumakov − M. : Radio i svyaz', 1994. − 165 s. |
Language of full-text | russian |
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