MODELING OF PROCESSES AND MATERIALS | |
Название | Modeling an influence of internal mechanical stresses on the rate of growth of oxygen precipitates in silicon |
Автор | R. V. Goldstein, T. M. Makhviladze, M. E. Sarychev |
Информация об авторе | A.Yu. Ishlinsky Institute for Problems in Mechanics of the Russian Academy of Sciences R. V. Goldshteyn
Institute of Physics and Technology of the Russian Academy of Sciences T. M. Makhviladze, M. E. Sarychev |
Реферат | In the work an approach to modeling the influence of mechanical stresses generated in a silicon matrix by an oxygen precipitate (SiO2) on the rates of the main processes determining the precipitation kinetics. The time dependences of the sizes of a spherical precipitate and the number of oxygen atoms inside it has been obtained and analyzed with the stress factor taken into account. |
Ключевые слова | Precipitate, mechanical stresses, diffusion, reaction rate |
Библиографический список | 1. Gol'dshteyn, R. V. Modelirovanie vliyaniya mekhanicheskikh napryazheniy na kinetiku rosta kislorodnykh pretsipitatov v kremnii / R. V. Gol'dshteyn, T. M. Makhviladze, M. E. Sarychev // Vestn. PGTU. Mekhanika. − 2010. − № 1. «Matematicheskoe modelirovanie fiziko−mekhanicheskikh protsessov». − S. 35—49. |
Language of full-text | русский |
Полный текст статьи | Получить |