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Название Investigation of influence of the conditions of growing from tellurium-based solution on morphology of epitaxial alloy (cadmium-mercury-tellurium) surface
DOI 10.17580/tsm.2016.12.09
Автор Andrusov Yu. B., Belov A. G., Konovalov A. A., Smirnova N. A.
Информация об авторе

JSC “Giredmet”, Moscow, Russia:

Yu. B. Andrusov, Senior Researcher, e-mail: andrusovyuri@gmail.com
A. G. Belov, Leading Researcher
A. A. Konovalov, Senior Researcher
N. A. Smirnova, Leading Researcher

Реферат

This paper shows the results of investigations of the influence of conditions of growing by liquid-phase epitaxion on morphology of epitaxial layers CdxHg1–xTe (0.20 < х < 0.23) surface. Epitaxial layers ((10±5) μm thickness) were grown from tellurium-based solutions on bottom layer Cd0.96Zn0.04Te, placed over the liquid phase layer. This process was carried out in isothermal conditions from over-cooled liquid phase and in the conditions of preliminary dissolution of the surface bottom layer in over-heated liquid phase with following growth of epitaxial layer in the forced system cooling. Growing from over-cooled solution leads to formation of chaotic terrace microrelief with terrace height up to 800 nm on the surface of epitaxial layers. Using the preliminary dissolution of the surface bottom layer and the following cooling ratio  < 0.5 deg/min, terrace pacing becomes regular, and their height is decreased to several tens of nanometers. Dissolution of the surface bottom layer in the solution, overheat by 4 oC (even with high values) leads to the convective flows in liquid phase and disorder of the planarity of the bottom layer
surface, followed by the grown epitaxial layer. During the solution overheating <2 oC and α > 0.2 deg/min, there is no disorder of the planarity of the bottom layer surface and epitaxial layer. At the same time, during the  > 0.5 deg/min, the growth defects are on the epitaxial layer surface, which quantity is higher, when the “a” value is higher, and sizes may reach 1 mm in diameter with height up to 10 μm.

This work was carried out with the support of the Ministry of Education and Science within the agreement about the subsidiary on 21 October 2014 No. 14.576.21.0055 (unique identifier RFMEFI57614X0055).

Ключевые слова Liquid-phase epitaxion, cadmium, mercury, tellurium, epitaxial layer, morphology, dissolution, defect, surface, planarity
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