Journals →  Materialy Elektronnoi Tekhniki →  2011 →  #4 →  Back

EPITAXIAL LAYERS AND MULTILAYERED COMPOSITIONS
ArticleName Ion implantation into the p–CdxHg1–xTe heteroepytaxial layers and crystals
ArticleAuthor A. V. Voitsekhovskii, N. Kh. Talipov
ArticleAuthorData

Tomsk State University

A. V. Voitsekhovskii

 

Peter the Great Academy of the Strategic Missile Force

N. Kh. Talipov

Abstract

The feature of distribution of a donor−like centers in the ion implanted p−Hg1−xCdxTe (MCT) bulk crystals and geterostructures, grown by molecular beam epitaxy (MBE) is presented. Boron ion implantation was performed in a wide range of doses, energies and current densities. Either abrupt n+/p–junction or n+/n/p–structures were formed both bulk crystals and geteroepitaxial layers depending on the implantation regimes and composition of MBE MCT. A model of the deep converted layers formation during ion implantation into the MCT was developed. The experimental validation of a model was carried out.

keywords Ion implantation, HgCdTe, defects, molecular beam epytaxy
References

1. Destefanis, G. L. Electrical doping of HgCdTe by ion implantation and heat treatment / G. L. Destefanis // J. Cryst. Growth. − 1988. − V. 86. − P. 700—722.
2. Pitcher, P. G. Formation of shallow photodiodes by implantation of boron into mercury cadmium telluride / P. G. Pitcher, P. L. F. Hemment, Q. V. Davis // Electronics Lett. − 1982. − V. 18, N 25. − P. 1090—1092.
3. Wu, T. B. Activation of boron implanted in Hg0.7Cd0.3Te by high−temperuter annealing / T. B. Wu, K. Y. Lam, C. D. Chaing, J. Gong, S. J. Yang // J. Appl. Phys. − 1988. − V. 63, N 10. − P. 4983—4988.
4. Talipov, N. Kh. Electrical activation of boron implanted in p−HgCdTe (x = 0,22) by low−temperature annealing under an anodic oxide / N. Kh. Talipov, V. N. Ovsyuk, V. G. Remesnik, V. V. Vasilyev // Mater. Sci. and Eng. B. − 1997. − V. 44. − P. 266—269.
5. Ovsyuk, V. N. Matrichnye fotopriemnye ustroystva infrakrasnogo diapazona / V. N. Ovsyuk, G. L. Kuryshev, Yu. G. Sidorov − Novosibirsk: Nauka, 2001. − 376 s.
6. Voytsekhovskiy, A. V. Radiatsionnoe defektoobrazovanie v varizonnykh epitaksial'nykh strukturakh CdxHg1−xTe pri ionnoy implantatsii / A. V. Voytsekhovskiy, D. V. Grigor'ev, A. G. Korotaev, A. P. Kokhanenko, N. Kh. Talipov // Izv. vuzov. Materialy elektron. tekhniki. − 2007. − № 2. − S. 35—40.
7. Voytsekhovskiy, A. V. Ionnaya implantatsiya v geteroepitaksial'nyy CdxHg1−xTe, vyrashchennyy metodom molekulyarno−luchevoy epitaksii / A. V. Voytsekhovskiy, D. V. Grigor'ev, N. Kh. Talipov // Izv. vuzov. Fizika. − 2008. − T. 51, № 10. − S. 3—18.
8. Bubulac, L. O. Role of junction formation in ion−implanted HgCdTe / L. O. Bubulac, W. E. Tennant // Appl. Phys. Lett. − 1987. − V. 51, N 5. − P. 355—357.
9. Bubulac, L. O. Defects diffusion and activation in ion implanted HgCdTe / L. O. Bubulac // J. Cryst. Growth. − 1988. − V. 86. − P. 7723—734.
10. Manchanda, Rachna. Evaluation of B+−implanted n+np HgCdTe structures using transient microwave reflectance / Rachna Manchanda, R. Pal, A. Malik, R. S. Saxena, O. P. Thakur, R. K. Sharma // J. Appl. Phys. − 2009. − V. 106, N 5. − P. 056103−1−056103−3.
11. Manchanda, Rachna. Be ion irradiation induced p− to n−type conversion in HgCdTe / Rachna Manchanda, R. K. Sharma, A. Malik, R. Pal, Anuradha Dhaul, M. B. Dutt, P. K. Basu // Ibid. − 2007. − V. 101, N 11. − P. 116102−1−116102−3.
12. Aquirre, M. H. Transmission electron microscopy of the induced damage by argon implantation in (111) HgCdTe at room temperature / M. H. Aquirre, H. R. Canera, N. E. Walsöe de Reca // Ibid. − 2002. − V. 92, N 10. − P. 5745—5748.
13. Uedono, Akira. Defects and their annealing properties in B+−implanted Hg0.78Cd0.22Te studied by positron annihilation / Akira Uedono, Hiroji Ebe, Masahiro Tanaka, Shoichiro Tanigawa, Kosaku Yamamoto, Yoshihiro Miyamoto // Jap. J. Appl. Phys. − 1998. − V. 37, N 3A. − P. 786—791.
14. Uedono, Akira. Defects in ion implanted Hg0,78Cd0,22Te probed by monoenergetic positron beams / Akira Uedono, Hiroji Ebe, Masahiro Tanaka, Rvoichi Suzuki, Toshiyuki Ohdaira, Shoichiro Tanigawa, Tomohisa Mikado, Kosaku Yamamoto, Yoshihiro Miyamoto // Ibid. − 1998. − V. 37, N 7. − P. 3910—3914.
15. Voitsekhovskii, A. V. A model for the prediction of radiation defect profiles in the semiconductor target (HgCdTe) subjected to high power short pulsed ion beams / A. V. Voitsekhovskii, A. P. Kokhanenko, S. A. Shulga, R. Smith // Nuclear Instrum. and Meth. in Phys. Res. B: Beam Interactions with Materials and Atoms. − 2005. − V. 227, N 4. − P. 531—544.
16. Burenkov, A. F. Prostranstvennye raspredeleniya energii, vydelennoy v kaskade atomnykh stolknoveniy v tverdykh telakh / A. F. Burenkov, F. F. Komarov, M. A. Kumakhov, M. M. Temkin − M., 1985. − 248 c.
17. Voytsekhovskiy, A. V. Profili raspredeleniya defektov v varizonnykh sloyakh geteroepitaksial'nykh struktur p−HgCdTe pri ionno−luchevom travlenii / A. V. Voytsekhovskiy, V. S. Volkov, D. V. Grigor'ev, I. I. Izhnin, A. G. Korotaev, A. P. Kokhanenko, M. Posyatsk, V. G. Sredin, N. Kh. Talipov // Izv. vuzov. Fizika. − 2008. − T. 51, № 9. − S. 51—56.
18. Ovsyuk, V. N. Osobennosti raspredeleniya donornykh tsentrov v kristallakh CdxHg1−xTe p−tipa pri nizkotemperaturnoy ionnoy implantatsii / V. N. Ovsyuk, N. Kh. Talipov // Prikladnaya fizika. − 2003. − № 5. − S. 87—92.

Language of full-text russian
Full content Buy
Back