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MODELING OF PROCESSES AND MATERIALS
ArticleName Modeling of diamond−like film formation. Part II: Synthesis from carbon С2−dimers
ArticleAuthor V. A. Tarala, B. M. Sinelnikov
ArticleAuthorData V. A. Tarala, South Research Center, Russian Academy of Sciencesand; B. M. Sinelnikov, State Educational Institution "VPO North Caucasus State Technical University".
Abstract

The results presented in this article are a model of the nucleation and growth of amorphous and crystalline diamond−like materials. This study deals with assessing the role of carbon C2−dimers in the structure formation of crystalline and amorphous diamond. The resulting model expressions show how changing the two most importanttechnological parameters (temperature and partial pressure of the C2−dimers) affect the structure of diamond−like carbon films.

keywords Simulation, amorphous and crystalline diamond−like materials, carbon dimers, film structure.
References

1. Sinel'nikov, B. M. Modelirovanie protsessov obrazovaniya amorfnykh i kristallicheskikh plenok ugleroda / B. M. Sinel'nikov, V. A. Tarala // Materialy elektron. tekhniki. - 2010. - № 1. - C. 32—40.
2. Rabeau, J. R. The role of C2 in nanocrystalline diamond growth / J. R. Rabeau, P. John, J. I. Wilson // J. Appl. Phys. - 2004. - V. 96, N 11. - P. 6724—6732.
3. Espinosa, H. D. Fracture strength of ultrananocrystalline diamond thin films - identification of weibull parameters / H. D. Espinosa, B. Peng, B. C. Prorok // Ibid. - 2003. - V. 94, N 9. - P. 6076—6084.
4. Zhou, D. Synthesis of nanocrystalline diamond thin films from an Ar-CH4 microwave plasma / D. Zhou, D. M. Gruen, L. C. Qin // Ibid. - 1998. - V. 84, N 4. - P. 1981—1989.
5. Williams, O. A. Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond / O. A. Williams, M. Daenena, J. D’Haen // Diamond and Related Mater. - 2006. - N 15. - R. 654—658.
6. Kim, K. A. Nanofountain probe with sub-100 nm molecular writing resolution / K. A. Kim, N. Moldovan, C. Ke // Small-journal. - 2005. - N 8. - R. 866—874.
7. Birrell, J. Behavior of metal contacts on ultrananocrystalline diamond / J. Birrell, J. A. Carlisle, O. Auciello // Appl. Phys. Lett. - 2002. - V. 81, N 12. - P. 2235—2237.
8. Yang, W. B. Growth of nanocrystalline diamond protective coatings on quartz glass / W. B. Yang, F. X. Lu, Z. X. Caoa // J. Appl. Phys. - 2002. - V. 91, N. 12. - P. 4912—4917.
9. Garguilo, J. M. Thermionic field emission from nanocrystalline diamond-coated silicon tip arrays / J. M. Garguilo, F. A. Koeck, R. J. Nemanich. // Phys. Rev. B. - 2005. - N 72. - P. 165404 (4).
10. Xiao, X. In vitro and in vivo evaluation of ultrananocrystalline diamond for coating of implantable retinal microchips / X. Xiao, J. Wang, J. A. Carlisle, B. Mech, R. Greenberg, R. Freda, M. S. Humayun, J. Weiland, O. Auciello // J. Biomedical Mater. - 2006. - N 77 (B). - P. 273—281.
11. Auciello, O. Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films / O. Auciello, J. A. Birrell, J. A. Carlisle // Phys. Condens. Matter. - 2004. - № 16. - P. R539—R552.
12. Srinivasan, S. Piezoelectric ultrananocrystalline diamond heterostructures for high-performance multifunctional micro / nanoelectromechanical systems / S. Srinivasan, J. Hiller, B. Kabius, O. Auciello. // Appl. Phys. Lett. - 2007. - V. 90, N 13. - P. 134101(3).
13. Tarala, V. A. Modelirovanie protsessov obrazovaniya almazopodobnykh plenok. Ch. I: sintez iz S2-dimerov ugleroda // V. A. Tarala, B. M. Sinel'nikov / Izv. vuzov. Materialy elektron. tekhniki. - 2011. - № 2. - S. 45—51.

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