This work is an analysis of the modern condition of semiconductor polycrystalline silicon production. The utilization of the silicon tetrachloride (STC) formed in the production as a by-product is one way to reduce polysilicon costs. The modern technology foresees the employment of silicon tetrachloride hydrogenation to trichlorosilane which is recirculated to the polysilicon manufacture stage. The present condition of the STC hydrogenation problem is described. Basic methods of the hydrogenation are analysed. The inference is made that at present the catalytic hydrogenation is more perspective for further investigation and industrial employment.

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