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MATERIALS SCIENCE AND TECHNOLOGY. DIELECTRICS
ArticleName LiTaO3: a Multifunctional Crystal for Opto– and Acoustoelectronics
ArticleAuthor O. A. Buzanov, S. A. Sakharov, D. V. Roshchupkin, E. V. Emelin, S. D. Lavrov
ArticleAuthorData

FOMOS Materials Co., Institute of Microelectronics Technology and High−Purity Materials of the Russian Academy of Sciences:

O. A. Buzanov

S. A. Sakharov

D. V. Roshchupkin

E. V. Emelin

 

Moscow State Technological University of Radio Engineering, Electronics and Automatics:

S. D. Lavrov

Abstract

Results of application of a ferroelectric LiTaO3 crystal in opto− and acoustoelectronics are presented. The large values of the piezoelectric constants in the LiTaO3 crystal are favorable for designing bulk acoustic wave resonators. The possibility of direct electron beam repolarization of LiTaO3 crystals was used for the fabrication of ferroelectric domain structures sizing from few nanometers to tenth micrometers. The regular domain structures in the LiTaO3 crystal were used as an optical diffraction grating and for the generation of second−harmonic optical radiation.

keywords Ferroelectric LiTaO3 crystal, electron−beam repolarization, BAW−resonators
References

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